JPH0472793B2 - - Google Patents

Info

Publication number
JPH0472793B2
JPH0472793B2 JP62163988A JP16398887A JPH0472793B2 JP H0472793 B2 JPH0472793 B2 JP H0472793B2 JP 62163988 A JP62163988 A JP 62163988A JP 16398887 A JP16398887 A JP 16398887A JP H0472793 B2 JPH0472793 B2 JP H0472793B2
Authority
JP
Japan
Prior art keywords
torr
metal
vacuum
reaction
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62163988A
Other languages
English (en)
Japanese (ja)
Other versions
JPS649878A (en
Inventor
Hirohiko Nakada
Masaaki Pponda
Masaya Myake
Takeya Motoyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62163988A priority Critical patent/JPS649878A/ja
Publication of JPS649878A publication Critical patent/JPS649878A/ja
Publication of JPH0472793B2 publication Critical patent/JPH0472793B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Welding/Diffusion-Bonding (AREA)
  • Ceramic Products (AREA)
JP62163988A 1987-07-02 1987-07-02 Bonding between silicon nitride ceramics and metal Granted JPS649878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62163988A JPS649878A (en) 1987-07-02 1987-07-02 Bonding between silicon nitride ceramics and metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62163988A JPS649878A (en) 1987-07-02 1987-07-02 Bonding between silicon nitride ceramics and metal

Publications (2)

Publication Number Publication Date
JPS649878A JPS649878A (en) 1989-01-13
JPH0472793B2 true JPH0472793B2 (en]) 1992-11-19

Family

ID=15784626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62163988A Granted JPS649878A (en) 1987-07-02 1987-07-02 Bonding between silicon nitride ceramics and metal

Country Status (1)

Country Link
JP (1) JPS649878A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05117842A (ja) * 1991-10-25 1993-05-14 Ulvac Japan Ltd 金属とセラミツクスの接合法
JP3495052B2 (ja) * 1992-07-15 2004-02-09 株式会社東芝 メタライズ体およびその製造方法
EP1617966B1 (en) * 2003-03-30 2011-06-29 L-3 Communications Corporation Method of diffusion bonding a microchannel plate to a dielectric insulator ; diffusion bonded microchannel plate body assembly
KR102496716B1 (ko) * 2015-10-27 2023-02-07 주식회사 아모센스 세라믹 기판 제조 방법
JP2020145335A (ja) * 2019-03-07 2020-09-10 株式会社Ｆｊコンポジット 回路基板の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0810710B2 (ja) * 1984-02-24 1996-01-31 株式会社東芝 良熱伝導性基板の製造方法
JPH07110795B2 (ja) * 1987-02-02 1995-11-29 住友電気工業株式会社 接合強度の優れたセラミツクスと金属の接合体

Also Published As

Publication number Publication date
JPS649878A (en) 1989-01-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term